Zeitschriftenartikel:
S. S. Kohneh Poushi, H. Mahmoudi, M. Hofbauer, B. Steindl, K. Schneider-Hornstein, H. Zimmermann:
"Experimental and simulation study of fill-factor enhancement using a virtual guard ring in n+∕p-well CMOS single-photon avalanche diodes";
Optical Engineering,
Vol. 60
(2021),
No. 6;
11 S.
Kurzfassung englisch:
The use of a physical guard ring in CMOS single-photon avalanche diodes (SPADs)based on n+/(deep)p-well and p+/(deep)n-well structures is a common solution to control the electric field of the SPADs periphery and prevent the premature lateral breakdown. However, this leads to a decrease of the detection efficiency, i.e., the fill-factor, especially when the SPADs size is reduced. Our paper presents an experimental and simulation study on replacing the physical guard ring by a virtual guard ring to improve the fill-factor and the scalability of a n+∕p-well SPAD implemented in 0.35-μm pin-photodiode CMOS technology. Accordingly, the optimization of the virtual guard ring and its superiority at downscaling are discussed, and the SPAD scalability in size with respect to the fill-factor is quantified in this technology.
Schlagworte:
single-photon avalanche diode; virtual guard ring; scalability; fill-factor.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1117/1.OE.60.6.067105
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.